Pressure transducer having electrically shielded...

Details Pressure transducer having electrically shielded... Pressure transducer having electrically shielded...

G - Physics

01

L

356/200, 349/56.

G01L 1/16 (2006.01) G01L 9/00 (2006.01) H01L 29/84 (2006.01)

Patent

CA 1134021

- 14 - Case 4251 A PRESSURE TRANSDUCER HAVING ELECTRICALLY SHIELDED PIEZORESISTIVE SENSORS ABSTRACT OF THE DISCLOSURE A diffused piezoresistive pressure transducer (10) is provided which is insensitive to surface charges which may develop in the use of the trans- ducer in a fluid-filled pressure transmitter assembly. To accomplish this a metalized shield (20) is formed over the diffused piezoresistive sensors (Rc; Rt) as an integral part of the transducer (10). The metalized shield (20) is connected to an electrical supply source (V.D.C.) to allow any charge build-up on the shield surface (20) to be bled therefrom with i no change in the potential difference between the diffused piezoresistive sensors (Rt; Rc) and the shield (20).

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