Pressure transducer with an invariable reference capacitor

Details Pressure transducer with an invariable reference capacitor Pressure transducer with an invariable reference capacitor

G - Physics

01

L

73/3

G01L 9/12 (2006.01) G01L 9/00 (2006.01)

Patent

CA 1190406

ABSTRACT OF THE DISCLOSURE A quartz capacitive pressure transducer including a sensing plate and a reference plate disposed on one quartz substrate which are opposed across a gap by a common plate on another quartz substrate to form capacitances. The substrates are maintained in their opposing relationship by an annular frit which seals a chamber between the sub- strates to a reference pressure. The reference plate is disposed in the area occupied by the frit annulus to provide a reference capaci- tance that has a zero pressure gradient.

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