F - Mech Eng,Light,Heat,Weapons – 16 – K
Patent
F - Mech Eng,Light,Heat,Weapons
16
K
F16K 17/02 (2006.01) G05D 7/06 (2006.01)
Patent
CA 2177790
A pressure type flow rate control apparatus (1) for controlling flow rate of a fluid maintains an upstream side pressure P1 of an orifice at more than about twice a downstream side pressure P2. In addition to an orifice-forming member (5) the apparatus includes a control valve (2) provided at the upstream side of the orifice, a pressure detector (3) provided between the control valve and the orifice, and an operation control device (6) for calculating a flow rate Qc from the detected pressure P1 of the pressure detector as Qc = KP1 (K being a constant) and issuing a difference as a control signal Qy between a flow rate command signal Qs and the calculated flow rate Qc to a drive unit of the control valve. The orifice upstream side pressure P1 is adjusted by opening and closing the control valve, thereby controlling the orifice downstream side flow rate.
Dohi Ryosuke
Fukuda Hiroyuki
Ikeda Nobukazu
Kawada Koji
Minami Yukio
Fujikin Incorporated
Riches Mckenzie & Herbert Llp
Tokyo Electron Limited
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