C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
148/2.55
C30B 25/02 (2006.01) H01L 21/208 (2006.01) H01L 21/324 (2006.01)
Patent
CA 1144453
PATENT APPLICATION of GEORGE A. ANTYPAS for PREVENTION OF DECOMPOSITION OF PHOSPHOROUS CONTAINING SUBSTRATES Abstract Loss of phosphorous from a phosphorous containing sub- strate is eliminated by maintaining a partial pressure of phosphorous in the vicinity of the substrate higher than the inherent partial pressure of phosphrous over the material of the substrate. The higher phosphorous partial pressure is obtained by positioning in the vicinity of the substrate a solution of an element such as tin or antimony containing phosphorous. The solvent metals are so chosen as to have higher solubility for phosphorous compared to the solution of phosphorous in the substrate material. The solution is exposed to the substrate in close juxtaposition but does not make physical contact with the substrate. The phosphorous vapor pressure above the solution will be proportional to the concentration of phosphorous in the solution. Con- sequently, since the solution is selected to have a higher solubility for phosphorous compared to solutions consisting of substrate elements, the vapor pressure will be proportionally higher. Thus, the region above the exposed substrate will contain phosphorous at a vapor pressure higher than the inherent vapor pressure of the material of the substrate and phosphorous loss is eliminated. 2ner3279 - 1 - 79-06
347434
R. William Wray & Associates
Varian Associates Inc.
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