Probe assembly for a scanning probe microscope

G - Physics – 01 – Q

Patent

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Details

G01Q 70/06 (2010.01) G01Q 60/22 (2010.01) G01Q 60/48 (2010.01) G01Q 60/54 (2010.01)

Patent

CA 2667917

A probe assembly is for use in a scanning probe microscope. The probe assembly includes a carrier having a plurality of at least three substantially identical probes, each probe having a tip that is located on a plane that is common to the plurality of probe tips and that is movable from this plane. The assembly also includes addressing means adapted to select one of the plurality of probes for relative movement with respect to a majority of the remainder of the probes. Such an assembly, with its potential to facilitate rapid, perhaps automated, replacement of a used probe, lends itself to use in high-speed scanning apparatus.

Un ensemble de sondes est destiné à être utilisé dans un microscope-sonde à balayage. L'ensemble de sondes comprend un support muni d'une pluralité d'au moins trois sondes sensiblement identiques, chaque sonde présentant une pointe située sur un plan commun aux différentes pointes de sonde et déplaçable à partir de ce plan. L'ensemble comporte également des moyens d'adressage aptes à sélectionner l'une des sondes pour un mouvement relatif par rapport à la majorité des autres sondes. Un tel ensemble permet un remplacement facile et rapide, voire automatisé, d'une sonde utilisée et peut être utilisé dans un appareil à balayage à vitesse élevée.

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