Probe device

Details Probe device Probe device

G - Physics

01

Q

G01Q 60/38 (2010.01)

Patent

CA 2503953

A probe unit comprising a cantilever having a probe being arranged oppositely to the surface of a sample, means for self-oscillating the cantilever at a specified frequency by feeding back the oscillation amplitude thereof, means for applying a bias to the sample or the probe, and means for measuring a frequency shift caused by a charge moving force acting between the cantilever and the sample.

Cette invention concerne unité de sonde comprenant un élément en porte-à-faux muni d'une sonde qui est disposée à l'opposé de la surface de l'échantillon, des moyens d'auto-oscillation de l'élément en porte-à-faux selon une fréquence spécifiée par retour de l'amplitude de l'oscillation, des moyens d'application d'une contrainte à l'échantillon ou à la sonde et des moyens de mesure des décalages de fréquence provoqués par une force déplaçant la charge qui s'exerce entre l'élément en porte-à-faux et l'échantillon.

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