Probe device and method of controlling the same

Details Probe device and method of controlling the same Probe device and method of controlling the same

G - Physics

01

Q

G01Q 60/34 (2010.01)

Patent

CA 2503957

A probe unit comprising a cantilever having a probe being arranged oppositely to the surface of a sample, and means for measuring the sample while switching between two operation modes, i.e. a tapping mode for measuring the surface structure of the sample by oscillating the cantilever and a point contact mode for measuring the electric characteristics of the sample by touching the probe to the sample, at a specified interval.

Cette invention concerne une unité de sonde comprenant un élément en porte-à-faux qui est muni d'une sonde située à l'opposé de la surface d'un échantillon et des moyens de mesure de l'échantillon lors du passage entre deux modes, soit un mode de piquage pour la mesure de la structure superficielle de l'échantillon consistant à faire osciller l'élément en porte-à-faux, et un mode par point de contact pour la mesure des caractéristiques de l'échantillon en mettant la sonde en contact avec l'échantillon à des intervalles spécifiés,

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