Probe for atomic force microscope, method of fabricating...

G - Physics – 01 – Q

Patent

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G01Q 60/38 (2010.01) G01Q 10/06 (2010.01)

Patent

CA 2199528

An AFM (atomic force microscope) probe having a sharpened probe tip is fabricated by a simple fabrication method. A probe whose tip is formed by crystal planes of a piezoelectric crystal substrate is offered. Also, a probe whose tip is formed by an isotropic method is proposed. Furthermore, methods of fabricating these probes are offered. Moreover, scanning atomic force microscopes are constructed, using these probes.

Une sonde pour microscope à forces atomiques (AFM) dotée d'une pointe très fine est fabriquée suivant une méthode simple. Il s'agit d'une sonde dont la pointe est formée par les facettes d'un cristal piézoélectrique. L'invention comporte aussi une sonde dont la pointe est formée suivant une méthode isotropique. De plus, des méthodes de fabrication de ces sondes sont proposées. En outre, on construit des microscopes à balayage à forces électroniques équipés de ces sondes.

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