Procedure and installation for supplying ultra-pure helium

Details Procedure and installation for supplying ultra-pure helium Procedure and installation for supplying ultra-pure helium

F - Mech Eng,Light,Heat,Weapons

17

C

F17C 7/04 (2006.01) C01B 23/00 (2006.01) F17C 9/02 (2006.01) F25J 3/08 (2006.01)

Patent

CA 2203090

With this process to provide ultra-pure helium for a cooling system (1), the helium, in liquid or supercritical form, is drawn from a reservoir (3) and filtered in this liquid or supercritical state (in 4). The filtered helium is vaporized and the resulting helium gas is passed into the cooling system (1). Application in the cooling of integrated circuit chips.

Suivant ce procédé, pour fournir à une conduite d'utilisation (1) de l'hélium ultra-pur, on soutire l'hélium, sous forme liquide ou supercritique, d'un réservoir de stockage (3), on le filtre sous cette forme liquide ou supercritique (en 4), on vaporise l'hélium filtré, et on envoie l'hélium gazeux résultant à la conduite d'utilisation (1). Application au refroidissement des pastilles à circuits intégrés.

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