Procedure for fabrication of microstructures over large...

Details Procedure for fabrication of microstructures over large... Procedure for fabrication of microstructures over large...

B - Operations, Transporting

44

C

149/10

B44C 1/22 (2006.01) B41C 3/00 (2006.01) G02B 5/18 (2006.01) G02B 6/136 (2006.01) H01L 31/0236 (2006.01)

Patent

CA 1216783

PROCEDURE FOR FABRICATION OF MICROSTRUCTURES OVER LARGE AREAS USING PHYSICAL REPLICATION ABSTRACT OF THE DISCLOSURE The present invention is an improved repli- cation process which copies a master pattern onto an intermediate transfer mask which is then used to form a lithographic mask on the surface of a substrate. A pattern derived from the original master pattern is then produced in the substrate by an etching process.

473514

Affiliated with

Also associated with

Rating

Procedure for fabrication of microstructures over large... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Procedure for fabrication of microstructures over large..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Procedure for fabrication of microstructures over large... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1338156