Process and apparatus for controllably separating framed...

H - Electricity – 01 – L

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H01L 21/70 (2006.01) G03F 1/14 (2006.01) G03F 7/20 (2006.01) H01L 21/00 (2006.01)

Patent

CA 2070325

Apparatus and a process for controllably separating a framed working area of a membrane from the remainder of the membrane is disclosed. The process includes tensioning an expanse of membrane material and fastening a support frame to the membrane to define a working portion of the same. A bondable polymeric material is applied to form a continuous border outward of the outer edge of the support frame. Additionally, the framed working area of the membrane is separated from the remainder of the membrane by cutting the membrane outward of the support frame.

Matériel et procédé permettant de séparer de façon contrôlable une surface de travail encadrée d'une membrane du reste de la membrane. Le procédé comprend le tensionnement d'une surface de matériau de la membrane et la fixation d'un cadre d'appui à la membrane afin de définir une zone de travail sur cette dernière. On applique un matériau polymérisé adhérent pour former une bordure continue en dehors du bord extérieur du cadre d'appui. En outre, on sépare la zone de travail encadrée de la membrane du reste de la membrane en coupant cette dernière en dehors du cadre d'appui.

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