Process and apparatus for depositing pyrolytic carbon coatings

Details Process and apparatus for depositing pyrolytic carbon coatings Process and apparatus for depositing pyrolytic carbon coatings

C - Chemistry, Metallurgy

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C23C 24/00 (2006.01) B01J 2/00 (2006.01) C01B 31/00 (2006.01) C01B 31/04 (2006.01) C04B 35/52 (2006.01) C23C 16/26 (2006.01) C23C 16/442 (2006.01)

Patent

CA 998888

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