G - Physics – 01 – R
Patent
G - Physics
01
R
G01R 31/26 (2006.01) G01R 31/28 (2006.01)
Patent
CA 2087189
2087189 9201234 PCTABS00010 The invention relates to a process for determining the carrier concentration in a semiconductor by applying between an ohmic contact and a rectifying contact formed on said semiconductor, a d.c. voltage resulting in a reverse bias Udc, and two periodic excitation signals having the frequencies .OMEGA.1 and .OMEGA.2, respectively. The process can be characterized in that .OMEGA.1 is bigger than .OMEGA.2, such that .OMEGA.1, .OMEGA.2, their difference (.OMEGA.1-.OMEGA.2) and their sum (.OMEGA.1+.OMEGA.2) are in the same order of magnitude, selecting two components from the electronic response of said semiconductor to the excitation, the first component being the electrical response to said frequency .OMEGA.1 and .OMEGA.2 and the second component being a first order intermodulation product of one of .OMEGA.1 and .OMEGA.2, and determining said carrier concentration by simultaneous, parallel analysis of said first and second components. The invention relates further to an apparatus for determining the carrier concentration in a semiconductor comprising a semiconductor sample having an ohmic contact and a rectifying contact; means for applying a d.c. voltage between said contacts, resulting in a reverse bias Udc, and two periodic excitation signals having the frequencies .OMEGA.1 and .OMEGA.2 respectively; oscillators to generate said periodic excitation signals; means for generating reference signals; means for amplifying two components selected from the electronic response of said semiconductor to the excitation, the first component being the electrical response to said frequency .OMEGA.1 or .OMEGA.2, and the second component being a first order intermodulation product of one of .OMEGA.1 and .OMEGA.2; and two phase-sensitive rectifiers for rectifying said selected two a.c. components.
Endredi Gabor
Tutto Peter
Endredi Gabor
Kirby Eades Gale Baker
Semilab Felvezeto Fizikai Laboratorium Rt
Tutto Peter
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