Process and apparatus for measuring surface distributions of...

H - Electricity – 01 – J

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H01J 47/06 (2006.01) G01T 1/29 (2006.01)

Patent

CA 1265628

Abstract A process for precision measurement of charged particle emissions from a surface and an apparatus for providing a high resolution digital image of the distribution of such emissions in a minimum exposure time over a relatively large surface area. The process of measurement uses the direction of emissions as determined by two or more position measuring elements of an area detector. The apparatus is based on multiple region detector elements that employ proportional amplification of ionization in a gas.

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