Process and apparatus for preparing ultrapure silicon

Details Process and apparatus for preparing ultrapure silicon Process and apparatus for preparing ultrapure silicon

C - Chemistry, Metallurgy

01

B

C01B 33/027 (2006.01) B01J 19/24 (2006.01) C01B 33/029 (2006.01) C01B 33/03 (2006.01)

Patent

CA 2744872

Described is a process for preparing high-purity silicon by thermal decomposition of a silicon compound, wherein the silicon compound is decomposed by mixing it with a carrier gas which is at a temperature at which the silicon compound is thermally decomposed. Additionally described are a reactor and a plant in which such a process can be performed.

L'invention concerne un procédé de fabrication de silicium ultra-pur par décomposition thermique d'un composé de silicium, le composé de silicium étant mélangé à un gaz porteur ayant une température à laquelle le composé de silicium est décomposé thermiquement. L'invention concerne également un réacteur et un dispositif dans lesquels un tel procédé peut être réalisé.

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