Process and apparatus for producing phosphine-containing gas

Details Process and apparatus for producing phosphine-containing gas Process and apparatus for producing phosphine-containing gas

C - Chemistry, Metallurgy

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C01B 25/00 (2006.01) A23B 9/18 (2006.01) A23L 3/3409 (2006.01) A23L 3/358 (2006.01) B01J 4/00 (2006.01) B01J 7/02 (2006.01) B01J 19/26 (2006.01) C01B 25/06 (2006.01) C01B 25/08 (2006.01)

Patent

CA 2178542

A process and apparatus is disclosed for generating a mixture of phosphine and diluent gas(es). A hydrolysable metal phosphide, preferably magnesium phosphide, is released directly into liquid water under an atmosphere of gas inert to phosphine and in a free-flowing particulate form, composed of loose metal phosphide particles. The generated mixture of phosphine and inert carrier gas, e.g. CO2, is used as such or is diluted into a gas mixing chamber with air to a concentration below the ignitability limit before being used in fumigation. Using argon as a carrier gas the phosphine mixture is suitable for semiconductor doping.

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