B - Operations – Transporting – 01 – J
Patent
B - Operations, Transporting
01
J
B01J 19/08 (2006.01) C23C 14/06 (2006.01) C23C 14/28 (2006.01) C23C 14/54 (2006.01) C23C 16/26 (2006.01) H01L 21/20 (2006.01) H01L 21/263 (2006.01) H01L 31/0216 (2006.01)
Patent
CA 2059185
PROCESS AND APPARATUS FOR PRODUCTION OF DIAMOND-LIKE FILMS ABSTRACT A process for production of diamond-like films comprising the steps of physically ablating a source of carbon in the vicinity of a substrate such that a carbon film grows on the substrate through bonding of carbon atoms in graphitic form and aliphatic form; and physically discriminating the carbon film during growth thereof by supressing or etching the graphitic form within the carbon film while permitting the aliphatic form to remain thereby resulting in a diamond-like film.
PROCEDE ET APPAREIL POUR LA PRODUCTION DE PELLICULES DIAMANTINES Procédé pour la production de pellicules diamantines, comprenant les étapes suivantes : ablation physique d'une source de carbone au voisinage d'un substrat, de façon à former une pellicule de carbone sur le substrat, par liaison d'atomes de carbone sous formes graphitique et aliphatique; séparer physiquement la pellicule de carbone pendant la formation de celle-ci en supprimant ou en décapant la forme graphitique à l'intérieur de la pellicule de carbone, tout en conservant la forme aliphatique, ce qui donne une pellicule ressemblant au diamant.
Bourdon Elisa
Prince Robert
Bourdon Elisa
Prince Robert
Sim & Mcburney
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