Process and apparatus for silicon boat, silicon tubing and...

B - Operations – Transporting – 29 – C

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B29C 43/16 (2006.01) B22F 3/17 (2006.01) B22F 3/20 (2006.01) B22F 3/22 (2006.01) B29C 47/02 (2006.01) C30B 11/00 (2006.01) C30B 23/06 (2006.01) C30B 25/08 (2006.01) C30B 29/34 (2006.01) C30B 35/00 (2006.01)

Patent

CA 2460996

Process, apparatus and application of silicon/silicon alloy/silicon compound (10) comprising at least one silicon atom boat, silicon/silicon alloy/silicon compound (10) comprising at least one silicon atom made epitaxial chamber and various silicon/silicon alloy/silicon compound comprising at least one silicon atom made tubing and liners is described here. Powder pressing (12-16), plasma and non plasma powder deposition, slurry deposition and slurry casting, silicon/silicon alloy casting and directional solidification are among few methods described here. Silicon/silicon alloy (10) made articles and some of their applications in the wafer processing industry is also described.

L'invention porte sur un procédé, sur un appareil et sur l'application d'un composite en silicium/alliage de silicium/silicium comprenant au moins une nacelle formée d'atomes de silicium, un composite en silicium/alliage de silicium/silicium comprenant au moins une chambre épitaxiale formée d'atomes de silicium et divers composites en silicium/alliage de silicium/silicium comprenant au moins un ensemble tubulaire et des revêtements formés d'atomes de silicium. L'invention porte également sur des procédés de compression des poudres, de dépôt des poudres par plasma et sans plasma, de dépôt et coulée de suspensions, de coulée de silicium/alliage de silicium et de solidification directionnelle, ainsi que sur des articles fabriqués en silicium/alliage de silicium et certaines de leurs applications dans l'industrie de transformation des plaquettes.

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