G - Physics – 01 – N
Patent
G - Physics
01
N
358/5
G01N 23/225 (2006.01) G01N 23/227 (2006.01) H01J 37/24 (2006.01) H01J 37/256 (2006.01)
Patent
CA 1048163
ABSTRACT OF THE DISCLOSURE A process of elementary and chemical analysis of samples by spectrum analysis of secondary electrons emitted by the sample when this is subjected to a beam of monoenergetic primary electrons concentrated on its surface, the process conforming with the spectral, geometric and temporal needs and characteristics previously set forth, consists in the following steps: the intensity of a beam of monoenergetic primary electrons Ep emitted by an electron gun is modulated according to a sinusoidal law at a frequency .omega.; the secondary electrons of energy E emitted by the sample are collected; the intensity of the collected beam is detected by generating an electric detection signal proportional to the said intensity; the intensity of the electrons beam modulated at the frequency .omega. of the detection signal, which provides the number of secondary electrons corresponding to the energy, is measured, and, the value of the collection energy E is modified in order to scan the energy spectrum comprised between the values E1 and E2 50 that one obtains the spectrum n(E) of the intensity of the secondary electron emission of the sample as a function of the energy E.
242530
Le Gressus Claude
Massignon Daniel
Sopizet Rene
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