Process and apparatus for the planarizing of rough,...

B - Operations – Transporting – 05 – D

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B05D 1/42 (2006.01) B05C 11/02 (2006.01) H01L 21/48 (2006.01) H01L 21/56 (2006.01) H01L 23/31 (2006.01)

Patent

CA 2010219

Abstract of the Disclosure A process and an apparatus for the planarizing of rough, structured or heterogeneous surfaces with a leveling layer. A cover layer permeable to energy radiation is laminated by means of a film pressing device, which comprises a sliding shoe and a feed device, on to a substrate base bearing the surface to be planarized. During lamination, the contact zone between the film pressing device and the substrate base forms a tapering laminating nip, which is constantly supplied with the organic coating material forming a film or layer.

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