Process and arrangement for the electrolytic deposition of...

C - Chemistry – Metallurgy – 25 – D

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C25D 21/14 (2006.01)

Patent

CA 2156407

For the electrolytic deposition of uniform layers of metal having given physical-mechanical properties, particularly of copper, soluble anodes are not used, since their geometrical shape is changed by the deposition and therefore the distribution of the lines of force in the electrolytic cell are continuously changed. In order to solve the problems occurring in this connection, a process has been proposed in which compounds of a redox system added to the plating solution are converted during the deposition on the insoluble anodes. The compounds produced in this connection dissolve new metal ions from a reservoir which contains parts of the metal to be deposited, so as again to supplement the metal ions removed form the solution by deposition. The present invention describes a procedure in which, differing from the prior art, the addition compounds are not destroyed.

Afin de précipiter par électrolyse des couches métalliques uniformes à propriétés physico-mécaniques déterminées, notamment en cuivre, on n'utilise pas d'anodes solubles, étant donné que la précipitation modifie leur forme géométrique et que la distribution des lignes de champ change ainsi de manière continue dans la cellule électrolytique. Afin de résoudre les problèmes qui en résultent, un procédé est proposé selon lequel on fait réagir pendant la précipitation sur les anodes insolubles des composés d'un système oxydoréducteur ajouté à la solution de précipitation. Les composés qui en résultent tirent de nouveaux ions métalliques d'une partie du réservoir qui contient le métal à précipiter afin de remplacer les ions métalliques tirés de la solution par précipitation. L'invention concerne ainsi un procédé qui ne détruit pas les composés par addition, au contraire de l'état de l'art.

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