Process and machinery for step-and-repeat vacuum-deposition...

Details Process and machinery for step-and-repeat vacuum-deposition... Process and machinery for step-and-repeat vacuum-deposition...

H - Electricity

01

L

345/61, 345/8

H01L 21/00 (2006.01) H01L 21/68 (2006.01) G02F 1/1362 (2006.01)

Patent

CA 1298634

"PROCESS AND MACHINERY FOR STEP-AND-REPEAT VACUUM-DEPOSITION OF LARGE- AREA THIN-FILM-ELECTRONICS MATRIX-CIRCUITS ON MONOLITHIC GLASS PANES THROUGH SMALL PERFORATED METAL MASKS." Abstract: Active matrix addressed liquid crystal TV sets configurated in the way described by A.G. Fischer in US-Pat. 3,840,695 can be enlarged to monolithic square-meter-sized wall TV panels. The large-area thin-film-electronic matrix circuit needed to address the superimposed liquid crystal layer can be vacuum-deposited from a multiple source evaporator onto one coherent glass pane through a number of exchanged small reticulated perforated sheet metal masks which are held successively against a chosen reticle of the large glass pane, in exact registration with each other and neighbouring reticles. The large glass pane must be precision-shifted in X-Y-reticle-steps for repeated vacuum depositions, in exact registration. The novel machinery required is described.

580004

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