F - Mech Eng,Light,Heat,Weapons – 24 – F
Patent
F - Mech Eng,Light,Heat,Weapons
24
F
F24F 11/04 (2006.01) F15C 3/00 (2006.01) F24F 3/16 (2006.01) F24F 11/047 (2006.01) G05D 7/00 (2006.01) G05D 7/01 (2006.01) G05D 7/06 (2006.01) G05D 16/10 (2006.01)
Patent
CA 2106186
To control the flow of air into and/or out of a process chamber, such as a clean room, a two-stage system is disposed in conduits leading into and/or out of the process-chamber. One stage includes a regulator, having a plenum (7, 79) disposed be- tween the environment and the air source or the vacuum source. The regulator maintains in the plenum a pressure that is between the pressures of the environment and the source and that is a constant amount different from the environment's pressure. The re- gulator includes a piston (5) having a frontal face (52) exposed to air in the plenum flowing between the environment and the source; and a distal face (51) exposed to the environment's pressure. The piston is mounted so as to variably impede the flow of air through the regulator and so that the weight of the piston tends to move the piston in a direction so as to lessen the piston's impedance on the air flow. The other stage includes an adjustable valve (21, Z5, 95), located between the regulator and the envir- onment, for further impeding the flow of air.
Gowling Lafleur Henderson Llp
Palmer David
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