Process for applying a protective layer to shaped carbon bodies

Details Process for applying a protective layer to shaped carbon bodies Process for applying a protective layer to shaped carbon bodies

B - Operations, Transporting

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B05D 7/00 (2006.01) B01L 3/04 (2006.01) C04B 41/52 (2006.01) C04B 41/89 (2006.01) C23C 16/02 (2006.01) C23C 16/32 (2006.01) C23C 16/34 (2006.01) C30B 15/10 (2006.01)

Patent

CA 1103104

PROCESS FOR APPLYING A PROTECTIVE LAYER SHAPED CARBON BODIES ABSTRACT OF THE DISCLOSURE The invention relates to the preparation of a material more favorably priced than the usual quartz crucible for use in the crucible-pulling of silicon according to Czechralski. To prevent reaction of the crucible wall with molten silicon, the surface of the shaped carbon body is coated by means of chemical vapor deposition first with a carbon-enriched silicon carbide layer and then with a carbon-enriched silicon nitride layer. The carbon-enriched silicon carbide layer is obtained by reacting a gaseous silicon compound with a gaseous carbon compound at a temperature of the shaped carbon body to be coated at 1250 to 1350°C while the carbon-enriched silicon nitride layer is obtained by reacting a gaseous organosilicon compound with ammonia at a temperature of the shaped carbon body of 1000 to 1200°C.

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