Process for casting on a support the faithful shadow of a...

Details Process for casting on a support the faithful shadow of a... Process for casting on a support the faithful shadow of a...

G - Physics

02

B

88/0.1, 95/94.4

G02B 1/00 (2006.01) G02B 5/00 (2006.01) G02B 27/42 (2006.01) G03F 7/20 (2006.01) G03F 9/00 (2006.01)

Patent

CA 1140373

ABSTRACT OF THE DISCLOSURE A process for casting on a support the faithful shadow of a mask pierced with periodically distributed slits. This process is particularly useful in photolitho- graphy. In the process the wavelength of a flat incident wave is chosen so that there exist only two diffracted orders for each of the two half-spaces defined by each slit and which are situated on each side of a mean plane of the mask midway between the exterior surfaces thereof. The angle of incidence of the flat wave is adjusted so that the reflected diffracted order which is not the specularly reflected order is propagated in the direction of the incident wave but in the opposite direction.

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