H - Electricity – 05 – K
Patent
H - Electricity
05
K
356/12, 96/256
H05K 3/26 (2006.01) C23G 1/00 (2006.01) C23G 1/10 (2006.01) C25D 5/34 (2006.01) G03F 7/42 (2006.01)
Patent
CA 1147246
Abstract of the Disclosure A process and an aqueous treatment solution for cleaning copper surfaces, In particular for removing residues of photore- sist layers which residues still adhere after development to the cleared copper areas, are described The solution contains a water-soluble aliphatic sulfonic acid having 8 to 30 carbon atoms or a water-soluble salt thereof.
337380
Herwig Walter
Klupfel Kurt
Sikora Helga
Sprengel Heide
Fetherstonhaugh & Co.
Hoechst Aktiengesellschaft
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