Process for cleaning copper-containing metal surfaces

H - Electricity – 05 – K

Patent

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356/12, 96/256

H05K 3/26 (2006.01) C23G 1/00 (2006.01) C23G 1/10 (2006.01) C25D 5/34 (2006.01) G03F 7/42 (2006.01)

Patent

CA 1147246

Abstract of the Disclosure A process and an aqueous treatment solution for cleaning copper surfaces, In particular for removing residues of photore- sist layers which residues still adhere after development to the cleared copper areas, are described The solution contains a water-soluble aliphatic sulfonic acid having 8 to 30 carbon atoms or a water-soluble salt thereof.

337380

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