Process for coating a substrate with a silica precursor

Details Process for coating a substrate with a silica precursor Process for coating a substrate with a silica precursor

B - Operations, Transporting

05

D

B05D 3/02 (2006.01) C04B 41/50 (2006.01) C23C 18/12 (2006.01) H01L 21/312 (2006.01) H01L 21/316 (2006.01)

Patent

CA 2069521

PROCESS FOR COATING A SUBSTRATE WITH A SILICA PRECURSOR ABSTRACT The present invention relates to a method of forming a silica coating on a substrate. The method comprises coating a substrate with a silica precursor having a melting point between about 50 and about 450°C. The coating is heated to a temperature above its melting point in an inert environment to allow the coating to melt and flow. The melted coating is then heated in an environment which facilitates conversion to silica for a time sufficient to convert it to silica.

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