Process for depositing a different thin film on an oxide...

H - Electricity – 01 – L

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H01L 39/24 (2006.01)

Patent

CA 2047001

Improvement in a process for depositing a thin film on an oxide superconductor thin film deposited previously on a substrate. A surface of the thin film of oxide superconductor is irradiated with laser beam pulses in high-vacuum of lower than 1 x 10-6 Torr before said another thin film is deposited thereon. The invention is applicable to fabrication of electronics devices such as Josephson element or superconducting transistors.

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