Process for depositing metallic copper

Details Process for depositing metallic copper Process for depositing metallic copper

C - Chemistry, Metallurgy

23

C

204/91.82

C23C 16/48 (2006.01) C23C 16/18 (2006.01) H05K 3/14 (2006.01)

Patent

CA 1225363

PHOTOCHEMICAL CONVERSION OF SiO TO SiO2 ABSTRACT SiO can be photochemically converted to SiO2 by irradiation with ultraviolet light of wavelengths less than 220 nm in an atomosphere including oxygen. The irradiation can be pulsed or continuous radiation, and energy fluences of at least about 5 mJ/cm2 will effect the photo- chemical reaction. The conversion of SiO to SiO2 can be used to provide an etch-stop in a fabrication process and to provide improved devices and circuits, in technologies such as Josephson and semiconductor device technologies.

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