C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 8/06 (2006.01) F26B 21/14 (2006.01)
Patent
CA 2070504
ABSTRACT OF THE DISCLOSURE A process for drying a metal surface to enhance the stability of a gas mixture containing one or more gaseous hydrides in low concentration in contact therewith, which comprises: a) purging gas in contact with said metal surface with inert gas to remove the purged gas, b) exposing the metal surface to an amount of a drying agent comprising an effective amount of gaseous hydride of silicon, germanium, tin or lead, and for a time sufficient to dry the metal surface, and c) purging the drying agent using inert gas.
Kasper Gerhard
Li Yao-En
Rizos John
L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Proced Es Geo
Swabey Ogilvy Renault
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