Process for electrochemical dissolution of semiconductors

Details Process for electrochemical dissolution of semiconductors Process for electrochemical dissolution of semiconductors

H - Electricity

01

L

H01L 21/306 (2006.01) H01L 21/3063 (2006.01) H01L 21/66 (2006.01)

Patent

CA 2087192

2087192 9201311 PCTABS00010 The invention relates to a process for the electrochemical dissolution of a semiconductor comprising contacting said semiconductor with an electrolyte suitable for its anodic dissolution and applying alternately anodic and cathodic direct currents to the interface of said semiconductor with said electrolyte such that the progress of the electrochemical dissolution is determined exclusively by the charge applied in the anodic process. The invention relates further to a process for the determination of a semiconductor characteristic varying with the depth in a semiconductor, as a function of depth, comprising contacting said semiconductor with an electrolyte suitable for its anodic dissolution, applying alternately anodic and cathodic direct currents to the interface of the semiconductor with said electrolyte such that the progress of said electrochemical dissolution is determined by the charge applied in the anodic phase, and simultaneously measuring a parameter proportionate with said semiconductor characteristic to be determined.

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