Process for fabricating a superconducting circuit

Details Process for fabricating a superconducting circuit Process for fabricating a superconducting circuit

H - Electricity

01

L

H01L 39/24 (2006.01) H01B 12/06 (2006.01) H01L 21/768 (2006.01) H01L 23/498 (2006.01) H01L 23/532 (2006.01)

Patent

CA 2185936

A process for fabricating a superconducting circuit having patterned superconducting wiring lines each made of a thin film of oxide superconductor deposited on a substrate. The process involves depositing a thin film of an oxide superconductor whole over a surface of the substrate in such a condition that the a-axis of crystals of said thin film orients perpendicularly to said surface of the substrate, forming an oxygen barrier layer through which oxygen can't pass in a desired pattern on a surface of said thin film, subjecting said thin film having said oxygen barrier layer thereon to a deoxygenation treatment to such an extent that exposed portions of said thin film change to no superconductor, and removing said oxygen barrier layer from a surface of said thin film to obtain a planar surface having patterned wiring lines at unexposed portions.

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