Process for fabricating device comprising lead zirconate...

Details Process for fabricating device comprising lead zirconate... Process for fabricating device comprising lead zirconate...

H - Electricity

01

L

H01L 41/00 (2006.01) C30B 25/04 (2006.01) C30B 29/32 (2006.01) H01L 41/24 (2006.01)

Patent

CA 2271282

The invention provides a device comprising an oriented, perovskite PZT layer on a diamond substrate, or other substrates such as silicon or platinum-coated materials. Vapor phase deposition processes are used to deposit a PZT layer onto a perovskite template layer on the substrate. The template layer is more readily deposited in a perovskite structure compared to PZT, and provides for nucleation and growth of the deposited PZT in perovskite form. The vapor phase deposition promotes the oriented structure of the resulting film. The structure is useful in a variety of devices, including surface acoustic wave devices.

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