Process for forming a film on the surface of a substrate by...

Details Process for forming a film on the surface of a substrate by... Process for forming a film on the surface of a substrate by...

C - Chemistry, Metallurgy

04

B

117/81, 148/3.5

C04B 41/45 (2006.01) C04B 41/50 (2006.01) C23C 16/452 (2006.01) H01L 23/29 (2006.01) H01L 29/00 (2006.01)

Patent

CA 914552

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