Process for forming diamond coating using a silent discharge...

C - Chemistry – Metallurgy – 23 – C

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204/96.34

C23C 16/26 (2006.01) C23C 16/27 (2006.01) C23C 16/44 (2006.01) C23C 16/50 (2006.01) C23C 16/513 (2006.01)

Patent

CA 2014367

Patent 0958p Calcote Case 1 PROCESS FOR FORMING DIAMOND COATINGS USING A SILENT DISCHARGE PLASMA JET PROCESS ABSTRACT OF THE DISCLOSURE A process for forming diamond coatings is disclosed, in which a gas of a mixture of gases is passed through a low temperature silent discharge to generate a low temperature non-equilibrium plasma gas stream, the plasma gas stream is adiabatically expanded into a region of lower pressure to form a plasma gas stream of highly ionized and dissociated gases, a carbon-containing gas is injected into the plasma gas stream during of after the expansion into a region of lower pressure, and the plasma gas stream is then directed onto the surface of a substrate to form the diamond coating.

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