Process for making alkyl arsine compounds

C - Chemistry – Metallurgy – 07 – F

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C07F 9/72 (2006.01) C23C 16/30 (2006.01) H01L 21/205 (2006.01)

Patent

CA 2091141

31,670-01 PROCESS FOR MAKING ALKYL ARSINE COMPOUNDS Abstract of the Disclosure Alkyl arsines are made by a reaction of gaseous arsine and the corresponding gaseous olefin in contact with at least one Bronsted acid catalyst. Products produced thereby are mono- and di-substituted arsines, e.g. alkyl and di-alkyl arsines, which contain substantially no metallic or oxygenating impurities. Cross-Reference to Related Applications This application is a continuation-in-part of our copending, U.S. application Serial No. 07/728,501, filed July 11, 1991 and is related Attorney's Docket No. 31671-01, filed concurrently herewith.

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