Process for making diamond, doped diamond, diamond-cubic...

Details Process for making diamond, doped diamond, diamond-cubic... Process for making diamond, doped diamond, diamond-cubic...

C - Chemistry, Metallurgy

23

C

204/96.34, 148/3

C23C 14/32 (2006.01) C30B 25/02 (2006.01) C30B 29/04 (2006.01) C23C 14/06 (2006.01)

Patent

CA 1329791

PROCESS FOR MAKING DIAMOND, DOPED DIAMOND, DIAMOND-CUBIC BORON NITRIDE COMPOSITE FILMS ABSTRACT OF THE INVENTION A process and apparatus that may be used for the production of diamond and doped diamond films at high rates by activated reactive vapor deposition. Carbon is evaporated in a vacuum chamber in the presence of atomic hydrogen containing plasma to form diamond precursors which then deposit on a substrate located within the vacuum chamber.

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