Process for making superconducting t1-pb-sr-ca-cu oxide...

H - Electricity – 01 – L

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H01L 39/24 (2006.01) H01L 39/12 (2006.01)

Patent

CA 2109962

A process for making a superconducting Tl-Pb-Sr-Ca-Cu-O thin film comprised of at least one phase of the formula Tl0.5Pb0.5Sr2Ca1+n Cu2+n O7+2n where n = 0,1 or 2. The process comprises sputtering an oxide film onto a dielectric sub- strate from an oxide target containing preselected amounts of Tl, Pb, Sr, Ca and Cu, and heating an oxygen-containing at- mosphere in the deposited film in the presence of a source of thallium oxide and lead oxide and cooling the film.

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