Process for making thin films by pulsed excimer laser...

Details Process for making thin films by pulsed excimer laser... Process for making thin films by pulsed excimer laser...

H - Electricity

01

L

H01L 39/12 (2006.01) C23C 14/08 (2006.01) C23C 14/28 (2006.01) H01L 39/24 (2006.01)

Patent

CA 2146629

A process for producing thin films of superconducting material by bombarding a heated target with radiation from pulsed high energy UV laser to form a plume of target material, and depositing the plume on a substrate is disclosed.

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