Process for manufacturing a semiconductor device

Details Process for manufacturing a semiconductor device Process for manufacturing a semiconductor device

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H01L 21/26 (2006.01) H01L 21/00 (2006.01) H01L 21/265 (2006.01) H01L 21/268 (2006.01) H05B 3/00 (2006.01)

Patent

CA 1143867

ABSTRACT OF THE DISCLOSURE A process of manufacturing a semiconductor device having the steps of implanting impurity ions to a surface of a semiconductor substrate; and radiating the substrate with incoherent light of which scope is wider than said substrate whereby the implanted region is electrically activated.

366877

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