Process for manufacturing an aluminum nitride ain substrate

C - Chemistry – Metallurgy – 01 – B

Patent

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Details

C01B 21/072 (2006.01) C04B 35/581 (2006.01) C04B 35/628 (2006.01) C23C 4/10 (2006.01) C23C 4/18 (2006.01)

Patent

CA 2442642

Procédé de fabrication d'un substrat en nitrure d'aluminium AIN, caractérisé en ce que le substrat est obtenu par projection d'une poudre à haute température et à haute vitesse sur un élément support, ladite poudre comportant des grains d'AIN recouverts d'une couche d'un précurseur d'oxyde, ledit précurseur d'oxyde étant choisi parmi les précurseurs oxydes donnant un oxyde formant une phase liquide autour des grains d'AIN au cours de la projection.

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