Process for manufacturing multi-layer glass ceramic substrate

Details Process for manufacturing multi-layer glass ceramic substrate Process for manufacturing multi-layer glass ceramic substrate

B - Operations, Transporting

28

B

B28B 17/02 (2006.01) H01L 21/48 (2006.01) H01L 23/15 (2006.01)

Patent

CA 2065537

A process for manufacturing a multi-layer glass ceramic substrate which comprises the steps of forming green sheets containing ceramic powders and glass powders as main ingredients, laminating the green sheets, and firing the laminated green sheets to form a multi-layer glass ceramic substrate, wherein at least one green sheet contains porous glass powders/as a part of the glass powders, is provided to control the shrinkage of the green sheets and prevent cracks or delamination. The preferred process comprises the steps of forming a signal layer by i) forming first green sheets containing ceramic powders, glass powders, hollow glass spheres and porous glass powders as main ingredients, ii) forming an interconnection layer on each of the first green sheets, and iii) laminating the first green sheets with the interconnection layer; sandwiching the signal layer between upper and lower green sheets containing ceramic powders and glass powders as main ingredients; and firing the sandwiched signal layer to form the multi-layer glass ceramic substrate.

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