H - Electricity – 01 – L
Patent
H - Electricity
01
L
356/127
H01L 21/82 (2006.01) H01L 21/225 (2006.01) H01L 21/3215 (2006.01) H01L 21/8249 (2006.01) H01L 27/06 (2006.01)
Patent
CA 1273128
- 1 - Abstract: The present invention relates to a process for forming field effect transistors and bipolar transistors in a semiconductor wafer. The method is comprised of the steps of creating layers of appropriately doped polycrystalline silicon material over areas of the semiconductor wafer that are to become source and drain regions of the field effect transistors and emitter regions of the bipolar transistors, and heating the semiconductor wafer. The heating is carried out such that the dopants from the polycrystalline silicon layers are diffused into the semiconductor wafer thereby simultaneously forming the source and drain regions of the field effect transistors and the emitter regions of the bipolar transistors.
610374
Chin Gen Man
Chiu Tzu-Yin
Hanson Ronald Curtis
Lau Maureen Y.
Lee Kwing Fai
American Telephone And Telegraph Company
Kirby Eades Gale Baker
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