Process for metallizing substrates using starved-reaction...

C - Chemistry – Metallurgy – 23 – C

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C23C 18/20 (2006.01) C04B 41/51 (2006.01) C04B 41/52 (2006.01) C04B 41/88 (2006.01) C04B 41/89 (2006.01) C23C 18/28 (2006.01) H05K 3/46 (2006.01) H05K 3/00 (2006.01) H05K 3/18 (2006.01)

Patent

CA 2089479

A unique process metallizes a substrate surface using a reducing agent including a borohydride to reduce, in a starved reaction, metal oxide particles (300) substantially uniformly distributed and at a controlled concentration in a particle filled resin (204) to produce catalytic island areas (301). The catalytic island areas (301) formed have a surface resistivity greater than 10 6 ohms per square. These catalytic island areas (301) are then electrolessly metallized to a predetermined thickness, such that adjacent catalytic island areas (301) are interconnected and form metallic features, such as pads, vias (213), and conductors (210, 211 and 212). The starved reaction limits the reduction of metal oxide particles (300) to catalytic island areas (301) and prevents migration of reduced metal beyond each of the exposed surfaces of particle-filled resin (204) which are to be metallized.

Procédé original de métallisation d'une surface de substrat grâce à un agent réducteur renfermant un borohydrure pour réduire, par une réaction contrôlée, des particules d'oxydes métallique (300), réparties presque uniformément à une concentration déterminée dans une résine (204), de façon à obtenir des surfaces catalytiques, sous forme d'îlots (301). Ces derniers (301), qui ont une résistivité superficielle supérieure à 10 6 ohms par unité de surface, sont ensuite mélallisés sans électrodes jusqu'à l'épaisseur voulue, de telle façon que des îlots catalytiques voisins (301) soient interconnectés en formant des structures métalliques, comme des plages, des vias (213) et des conducteurs (210, 211 et 212). La réaction contrôlée limite la réduction des particules d'oxyde métallique (300) aux îlots catalytiques (301) et empêche la migration du métal réduit au delà de chacune des surfaces exposées de la résine (204) à métalliser.

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