C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 10/06 (2006.01) C23C 8/02 (2006.01) C23C 8/06 (2006.01) C23C 8/80 (2006.01)
Patent
CA 2070145
ABSTRACT OF THE DISCLOSURE A process for passivating a metal surface to enhance the stability of a gas mixture containing one or more gaseous hydrides in low concentration in contact therewith, which comprises: a) purging gas in contact with said metal surface with inert gas to remove the purged gas, b) exposing the metal surface to an amount of a gaseous passivating agent comprising an effective amount of a gaseous hydride of silicon, germanium, tin or lead and for a time sufficient to passivate said metal surface, and c) purging said gaseous passivating agent using inert gas.
Kasper Gerhard
Li Yao-En
Rizos John
L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Proced Es Geo
Swabey Ogilvy Renault
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