Process for preparing a charge coupled device with charge...

Details Process for preparing a charge coupled device with charge... Process for preparing a charge coupled device with charge...

H - Electricity

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356/199

H01L 21/28 (2006.01) H01L 21/339 (2006.01) H01L 29/768 (2006.01) H01L 29/78 (2006.01)

Patent

CA 1277444

AN IMPROVED PROCESS FOR PREPARING A CHARGE COUPLED DEVICE WITH CHARGE TRANSFER DIRECTION BIASING IMPLANTS Abstract of the Disclosure A process is disclosed of preparing a charge coupled device containing charge transfer direction biasing implants wherein the steps and materials for patterning electrodes and implants promote accurate edge alignments of implants and electrodes while minimizing strains and avoiding temperatures that permit unwanted lattic or intersticial ion migration in the semiconductive substrate.

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