C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
117/159, 204/96.
C23C 14/08 (2006.01) C23C 14/24 (2006.01) C23C 14/34 (2006.01) H01L 39/24 (2006.01)
Patent
CA 2037795
A process for preparing a-axis oriented thin film of oxide superconducting material on a substrate by two steps. In the first step, an under-layer of an oxide superconducting material is deposited on the substrate under such a condition that the substrate is heated at a temperature which is suitable to realize an a-axis orientation of crystal of the oxide superconducting material. In the second step, an upper-layer of the same oxide superconducting material is deposited on a surface of the resulting under-layer under such a condition that the substrate is heated at a temperature which is higher by 10 to 100 °C than the temperature which is used in the first step.
Cette invention concerne un procédé de dépôt en deux étapes d'un oxyde supraconducteur en couche mince orienté dans l'axe a. € la première étape, une sous-couche d'oxyde supraconducteur est déposé sur un substrat porté à une température propipce à l'orientation de la structure cristalline de matériau selon l'axe a. € la seconde étape, une autre couche du même oxyde supraconducteur est déposée sur la première, le substrat étant porté à une température de 10 à 100 degrés Celsius supérieure à celle atteinte en première étape.
Itozaki Hideo
Nakanishi Hidenori
Tanaka Saburo
Bereskin & Parr
Sumitomo Electric Industries Ltd.
LandOfFree
Process for preparing high-temperature superconducting thin... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Process for preparing high-temperature superconducting thin..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for preparing high-temperature superconducting thin... will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1692334