Process for preparing polysilicon using exothermic reaction

Details Process for preparing polysilicon using exothermic reaction Process for preparing polysilicon using exothermic reaction

C - Chemistry, Metallurgy

30

B

23/326, 148/2.3,

C30B 29/06 (2006.01) C01B 33/03 (2006.01) C01B 33/035 (2006.01) C30B 25/02 (2006.01)

Patent

CA 2283562

The disclosure describes a process for the preparation of polysilicon by a thermal decomposition or hydrogen reduction of a reaction gas including a silane gas, which comprises introducing hydrogen chloride into a reactor in addition to the reaction gas and utilizing within the reactor the heat of reaction generated from the reaction between the hydrogen chloride and silicon as an additional heat source.

L'invention concerne un procédé de préparation de silicium polycristallin par décomposition thermique ou par réduction à l'hydrogène d'un gaz de réaction comprenant un silane gazeux. Ledit procédé consiste à introduire, outre le gaz de réaction, du chlorure d'hydrogène dans le réacteur et à utiliser dans ce dernier la chaleur de réaction générée par la réaction entre le chlorure d'hydrogène et le silicium comme source de chaleur additionnelle.

Affiliated with

Also associated with

Rating

Process for preparing polysilicon using exothermic reaction does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for preparing polysilicon using exothermic reaction, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for preparing polysilicon using exothermic reaction will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-2030551