Process for preparing radiation sensitive compound and...

Details Process for preparing radiation sensitive compound and... Process for preparing radiation sensitive compound and...

C - Chemistry, Metallurgy

07

D

C07D 311/60 (2006.01) C07C 303/28 (2006.01) C07C 309/76 (2006.01) G03F 7/022 (2006.01)

Patent

CA 2065468

-15- ABSTRACT OF THE DISCLOSURE A radiation sensitive compound prepared by reac- ting a phenol compound with a quinone diazide sulfonyl halide in a mixture of a solvent having a relative dielect- ric constant of not larger than 10 and a solvent having a relative dielectric constant of at least 15, which compound is less colored and gives a positive resist composition having a good resolution.

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