C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
C30B 23/08 (2006.01) C23C 14/00 (2006.01) C23C 14/08 (2006.01) C30B 23/02 (2006.01) H01L 39/24 (2006.01)
Patent
CA 2093729
A process for preparing an oxide superconductor thin film which has a high crystalline, clean and excellent superconductive surface on a substrate by MBE. The MBE is effected under a condition that the substrate is heated and an oxidizing gas is locally supplied to the proximity of the substrate so that the pressure in the proximity of the substrate is 6 x 10 -6 to 8 x 10 -5 Torr at a background pressure of lower than 1 x 10 -9 Torr.
Bereskin & Parr
Sumitomo Electric Industries Ltd.
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